Thin Solid Films, Vol.394, No.1-2, 131-135, 2001
Ca- and Sr-doped (Pb1-xLax)(ZryTi1-y)(1-x/4)O-3 thin films for low-voltage operation
By adding Ca and Sr to (Pb1-xLax)(Zr-y,Ti1-y)(1-x)/O-4(3) (PLZT, Zr/Ti=30: 70, 200 nm), we have successfully reduced the operating voltage, such that saturated hysteresis loops can be observed at an applied voltage of 2.5 V. It was observed that the voltage shifts induced by heat and remanence polarization changes in these Ca- and Sr-doped PLZT thin films are almost constant above 2.5 V, indicating near-complete saturation at this voltage. Even with Pt electrodes, these reduced voltage/electric field levels allow conservation of nearly 90% of the polarization after 10(9) switching cycles.
Keywords:Pb-La-Zr-Ti (PLZT) thin film;chemical solution deposition;ferroelectric properties;platinum