화학공학소재연구정보센터
Thin Solid Films, Vol.395, No.1-2, 335-338, 2001
Stability of hydrogenated nanocrystalline silicon thin-film transistors
Hydrogenated nanocrystalline silicon thin-films were obtained by catalytic chemical vapour deposition at low substrate temperatures (150 degreesC) and high deposition rates (10 Angstrom /s). These films, with crystalline fractions over 90%, were incorporated as the active layers of bottom-gate thin-film transistors. The initial field-effect mobilities of these devices were over 0.5 cm(2)/V s and the threshold voltages lower than 4 V In this work, we report on the enhanced stability of these devices under prolonged times of gate bias stress compared to amorphous silicon thin-film transistors. Hence, they are promising candidates to be considered in the future for applications such as flat-panel displays.