화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.18, No.4, 1326-1328, 2000
Fabrication of bismuth nanowires with a silver nanocrystal shadowmask
We fabricated bismuth (Bi) nanowires with low energy electron beam lithography using silver (Ag) nanocrystal shadowmasks and a subsequent chlorine reactive ion etching. Submicron-size metal contacts on the single Bi nanowire were successfully prepared by in situ focused ion beam metal deposition for transport measurements. The temperature dependent resistance measurements on the 50 nm wide Bi nanowires showed that the resistance increased with decreasing temperature, which is characteristic of semiconductors and insulators.