Journal of Vacuum Science & Technology A, Vol.18, No.4, 1915-1918, 2000
Optimized structural properties of wurtzite GaN on SiC(0001) grown by molecular beam epitaxy
We have investigated the optimal conditions for molecular beam epitaxial growth of high quality GaN on 6H-SiC(0001) substrates. The quality of these films is reflected both by the narrow x-ray peak widths as well as the excellent surface morphology. In this work, it is shown that increasing growth temperature leads to an improvement in bulk quality and lower x-ray peak widths for both symmetric and asymmetric reflections. We also note a marked improvement in surface morphology, from a columnar appearance to a two-dimensional surface, under extremely Ca-rich growth conditions.