Journal of Vacuum Science & Technology A, Vol.18, No.4, 1955-1958, 2000
Resonant Auger studies of metallic systems
Results of resonant Auger spectroscopy experimental are presented for Cu, Co, and oxidized Al. Sublifetime narrowing of Auger spectra and generation of sublifetime narrowed absorption spectra constructed from Auger yield measurements were observed. Resonant Auger yields are used to identify three chemical states of oxidized Al. Partial absorption yield spectra were derived giving detailed electronic information and thickness information for the various chemical states of the bulk metal, the passivating aluminum oxide layer, and the metal-oxide interface region. In addition, the total absorption yield spectrum for the oxidized Al sample was constructed from the partial yield data, supporting the consistency of our method.