Journal of Vacuum Science & Technology A, Vol.19, No.1, 158-166, 2001
Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition
We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices.