Journal of Vacuum Science & Technology A, Vol.19, No.5, 2186-2193, 2001
Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling
The preparation of transmission electron microscopy cross-section specimens using focused ionbeam milling is outlined. The "liftout" and "trench" techniques are both described in detail, and their relative advantages and disadvantages are discussed. Artifacts such as ion damage to the top surface and sidewalls of the cross-section specimens, and methods of reducing them, are addressed.