Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.19, No.6, 2879-2883, 2001 DOI10.1116/1.1412652 Export Citation Fabrication and characterization of C implantation standards for Si1-x-yGexCy alloys Laursen T, Chandrasekhar D, Hervig RL, Mayer JW, Smith DJ, Jasper C Known amounts of carbon were implanted into a set of Si1-xGex alloy films (0 Please enable JavaScript to view the comments powered by Disqus.
