화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.19, No.6, 2905-2909, 2001
Effect of substrate-film lattice mismatch in La0.7Ba0.3MnO3-delta thin films for transport properties
In this study, we explore the use of La0.7Ba0.3MnO3 - delta (LBMO) for use in uncooled infrared bolometers. To obtain a high temperature coefficient of resistance (TCR) (defined as 1/R dR/dT) at near-room temperature, thin films were deposited on SrTiO3 (100), LaAlO3 (100) and MgO (100) substrates by a laser ablation method. The substrate-film lattice mismatch between these substrates and LBMO films caused misfit stress which changed the surface structure of the films and influenced their temperature dependence of resistivity. The microstructures of films were characterized by x-ray diffraction and atomic force microscope. As a result, the LBMO film deposited on SrTiO3 (the LBMO/STO film) had crystallinity like LBMO bulk and showed high orientation of the substrate. And its temperature dependence of resistivity agreed with LBMO bulk. Near 300 K the LBMO/STO film showed high TCR values, about 4%/K. In addition, the TCR values of the LBMO/STO films were over 2%/K over a wide temperature range centered near 300 K. These results suggest that LBMO/STO films are possible for use as an uncooled infrared bolometer material.