Nonevaporable thin film getters based on the elements of the fourth and fifth columns of the periodic table were deposited by sputtering. Among the some 20 alloys studied to date, the lowest activation temperature (about 180 degreesC for a 24 h heating) was found in the Ti-Zr-V system with a well-defined composition range. Characterization of the activation behavior of such Ti-Zr-V films is presented. The evolution of the surface chemical composition during activation is monitored by Auger electron spectroscopy and the functional properties are evaluated by pumping speed measurements. The pumping speed characteristics are quite similar to those already measured for commercially available nonevaporable getter materials, except for the much lower saturation coverage for CO. This inconvenience, which is due to the smooth surface structure of these films, can be counteracted by increasing the roughness of the substrate.