Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.19, No.1, 305-307, 2001 DOI10.1116/1.1338552 Export Citation Silicon nitride as an effective protection against oxidation of a TiNi thin film in high temperature oxidizing air environment at atmospheric pressure Roch I, Buchaillot L, Wallart X, Collard D Please enable JavaScript to view the comments powered by Disqus.
