Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.20, No.8, 769-772, 2001 DOI10.1023/A:1010904301577 Export Citation Sputtering and reactive ion etching damage to the Pt/Pb(Zr,Ti)O-3/Pt thin film capacitors Lee EG, Lee JG, Kim SJ Please enable JavaScript to view the comments powered by Disqus.
