The deposition of polystyrene latex particles of 0.46 mum diameter was studied in situ using a wall-jet cell in combination with total internal reflection microscopy. The particles were deposited onto an indium tin oxide surface in a laminar flow field for up to 13 h. The initial particle Bur was found to be mass-transfer-controlled. It was shown that one period of the time-dependent deposition rate period was of first-order nature. The effective particle transfer coefficient during this period appeared to be correlated inversely to the wall shear rate. With the help of three characteristic empirical constants, one of them being a mass transfer coefficient, the overall deposition process was described by a model equation. The concentration dependency was elucidated using a Langmuir-type pseudoisotherm.