Journal of Vacuum Science & Technology B, Vol.19, No.6, 2749-2752, 2001
High-Q photonic crystal microcavities fabricated in a thin GaAs membrane
We report on the fabrication of photonic crystal microcavities in GaAs having H I and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process.