화학공학소재연구정보센터
Thin Solid Films, Vol.398-399, 405-412, 2001
Application of an planar X-ray waveguide for structure study of thin film coatings
Details of a planar X-ray waveguide (PXW) built using total X-ray reflection phenomenon are described. The design of the planar X-ray waveguide-monochromator is mentioned in passing. The efficiency of the X-ray beam forming systems based on a planar X-ray waveguide and on a conventional slits superimposition is compared. Characteristics of an X-ray diffractometer equipped with PXW are analyzed. Experimental diffractometer patterns of a polycrystal thin gold film on a Si wafer obtained by using a HZG-4 diffractometer equipped with PXW in the modified Bragg-Brentano diffraction geometry are presented.