Thin objects like smart cards, tags or electronic labels may find benefit to be powered by an electrical source. This source must be very thin (typically between 0.1 and 0.4 mm) and flexible. It comprises the active elements and the encapsulation. We have developed a rechargeable microbattery whose active element is constituted of a four layers structure (thickness < 10 mum). It is encapsulated in a flexible package (total thickness 0.2 mm). Three of the four layers are deposited by magnetron sputtering, the other is done by evaporation. Three of the deposited materials are very sensitive to humidify. A semi-industrial deposition equipment was developed. It is based on a multichamber principle, all connected to a central glove box. This design allows to perform the deposition of the layers in parallel and to work in a fully dry environment. productivity and quality of the batteries produced are improved at the same time and the next industrial step is anticipated.