Previous Article Next Article Table of Contents Chemie Ingenieur Technik, Vol.73, No.9, 1168-1172, 2001 DOI10.1002/1522-2640(200109)73:9<1168::AID-CITE1168>3.0.CO;2-5 Export Citation Processes for applying Al2O3 coatings in the microchannels of completed microstructures Wunsch R, Fichtner M, Gorke O, Haas-Santo K, Schubert K Please enable JavaScript to view the comments powered by Disqus.
