Thin Solid Films, Vol.402, No.1-2, 83-89, 2002
A comprehensive study of SiC growth processes in a VPE reactor
We performed an experimental study of the effect of the gas phase composition on the growth mechanism of 3C-SiC on Si(100) by atmospheric-pressure vapour phase epitaxy at 1350 degreesC. Silane and propane diluted in hydrogen were used as precursors for the growth. We demonstrate the existence of an equilibrium partial pressure of carbon above the growing surface, which ensures a mirror-like morphology. For too low a carbon partial pressure (C/Si ratio in the gas phase lower than 2.7 with a growth rate of 3 mum h(-1)), the layer morphology and crystalline quality quickly degrade. For too high a carbon partial pressure (C/Si ratio higher than 5 with the same growth rate), SiC clusters form on the growing layers. We propose a mechanism of formation for these clusters taking into account the interactions between the C and Si species in the hot boundary layer.