화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.149, No.2, G143-G146, 2002
Novel cleaning methodology for steel substrates in microelectronic fabrication
We report on the development of a novel cleaning methodology for use with steel substrates in microelectronic fabrication. The statistical experimental design that was employed to identify the most significant factors in removing particles is presented and the effectiveness of the resulting clean formulation is detailed.