The degradation behavior of ZnS:Ag, Cl as a phosphor for CL by EB irradiation at 7 kV was examined by TL measurement. After EB irradiation, TL intensity decreased and the TL peak shifted to the lower temperature side. By comparing TL thermograms of mechanically damaged ZnS:Ag, Cl, ZnS:Cl with varying Cl concentration as well as ZnS:Ag, Al after EB irradiation, we conclude that the decrease in the effective concentration of Cl-, serving as active luminescence center, is responsible for the CL degradation of ZnS:Ag, Cl by EB irradiation.