In an attempt to provide ohmic contacts to silicon nanowires (SiNWs), SiNWs wrapped with Au film have been fabricated. Au particles were deposited on the as-grown SiNWs and followed by electron. beam annealing under transmission electron microscopy (TEM). The high-resolution TEM (HRTEM) study showed the transformation of the Au particles into crystalline Au film. The uniformity of An film was dependent upon the size and the separation of the Au particles.