Novel processes to realize low-dimensional arrangement of SiO2 particles were proposed. Particle wires and a pattern of the close-packed particle monolayer were fabricated in the solution at room temperature. SAMs (self-assembled monolayers) were formed on Si substrates and modified to be suitable for templates of precise arrangement. Particles were arranged precisely in the desired positions in the solution using well-controlled electrostatic interactions and chemical bond formation between particles and substrates.