화학공학소재연구정보센터
Thin Solid Films, Vol.405, No.1-2, 87-91, 2002
Oxide thin film deposition on eutectic substrates
Thin films of different oxide materials have been deposited on special substrates prepared from eutectic composition in Ca-stabilised zirconia (CaSZ)/CaZrO3(CZO) and Mg-stabilised zirconia (MgSZ)-MgO systems. All of these phases are good candidates for oxide film deposition from the point of view of chemical inertness and lattice matching. The YBa2Cu3O7 (YBCO) and La2/3Ca1/3MnO3 (LCMO) films deposited on these substrates have shown a selective oriented growth depending on the substrate orientations. They reproduce the same pattern as the substrate, with different arrangements of two well-defined orientations. By choosing the proper substrate cut, we have been able to obtain: M a parallel strip pattern of biepitaxial YBCO/CSZ-CZO, which shows a clear anisotropy in its transport properties; (ii) an array pattern of polycrystalline YBCO islands in a c-axis oriented YBCO film on MgSZ-MgO substrates; or (iii) a strip pattern of alternating epitaxial and randomly oriented polycrystalline LCMO material.