Thin Solid Films, Vol.408, No.1-2, 11-14, 2002
Barium titanate glass-ceramic thin films for integrated high-dielectric media
Ba-Ti-B glass-ceramic thin films with a substantial number of perovskite barium titanate (BaTiO3) grains were deposited on Pt-coated silicon substrates by sol-gel processing. The prepared films exhibited a mixed structure of glass phase and BaTiO3 grains tens of nanometers in diameter. A self-mending phenomenon for microcracks was observed in the films. Electrical characterisation results showed a high dielectric constant. low leakage current and dielectric loss. The potential application of the BaTiO3 glass-ceramic thin films for integrated high-dielectric media is discussed.