화학공학소재연구정보센터
Thin Solid Films, Vol.411, No.2, 198-202, 2002
Characteristics of transparent and conductive undoped ZnO thin films obtained by chemical spray using zinc pentanedionate
Zinc oxide (ZnO) thin films without intentionally doping were prepared from 2,4-zinc pentanedionate by the chemical spray technique. Electrical, structural and morphological properties of these films as a function of the substrate temperature were studied. A resistivity of 2X10(-1) Ohm cm, a mobility of 11 cm(2)/V s, a carrier concentration of 5X10(19)/cm(3) and an average transmittance of 85% in the visible range were obtained for undoped ZnO films prepared at 500 degreesC, with no post-annealing process. Also, the morphology varies with the substrate temperature. It was found that the surface shows a texture suitable for light trapping, as well.