The 3-D deformation of metal multilayers under nanoindentation sites has been evaluated using the method of 3-D focused ion beam mapping. 3-D maps of both surface and subsurface layers have been determined, from which a comparison of the deformation caused by a 1020 and a 265 nm depth indent has been made. The residual indent shapes have been examined with reference to the orientation of the indenting Berkovich tip.