화학공학소재연구정보센터
Thin Solid Films, Vol.413, No.1-2, 171-176, 2002
Laser irradiation effects on the resistance of SmS films
Samarium monosulfide (SmS) films deposited by flash evaporation to realise pressure sensors have been processed by ultraviolet laser radiation at 308 nm to modulate their electrical resistance. The laser irradiation effects on the resistance of SmS films have been investigated at different laser fluences. It is shown that the SmS film resistance can be significantly modulated, even at fluences lower than the laser ablation fluence. The effects induced by laser processing on the film surface structure have also been investigated.