The volatile organic compounds (VOCs) such as benzene, toluene, ethylbenzene, and xylene were decomposed by electron beam (E-Beam) irradiation. In this study, some influencing factors such as absorbed dose, humidity, and temperature were investigated. In general, the decomposition rates of VOCs increased as dose increased and the VOC concentration decreased. For aerosol moisture and water vapor condition, decomposition efficiency were about 10% and 20% higher than for the dry state. It was also found that the temperature variations from 25 ℃ to 130 ℃ did not affect significantly the decomposition rates of the VOCs.