The hydrolysis rate of alkoxy silane (dimethyldiethoxy silane, DMDES, etc.) is a linear relationship vs. the reaction time under the moisture flux control. The hydrolysis process results in formation of the linear polysiloxane products by a subsequent condensation reaction. An amidized alkoxy silane (3-(2-aminoethyl)aminopropylmethyldimethoxy silane, KLM-602 or gamma-aminopropyl-triethoxy silane, gamma-APS) serves as an internal standard of DMDES hydrolysis kinetics measurements. The hydrolysis kinetics of DMDES with the amidized alkoxy silane and the subsequent linear polysiloxanes conversion have been evaluated and characterized by Si-29- and C-13-NMR NMR spectroscopic measurements.