Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.21, No.10, 765-766, 2002 DOI10.1023/A:1015793507762 Export Citation Effect of the species of sputtering gas on the composition of multi-component glass film: A new approach to control the composition of multi-component glass film Akai T, Yamanaka H Please enable JavaScript to view the comments powered by Disqus.
