The effects of thickness extension mode resonance oscillation (TERO) of acoustic waves on the catalytic properties of a 100 nm thick Pd film deposited a positively polarized ferroelectric z-cut LiNbO3 single crystal were studied. For ethylene and acetaldehyde production in ethanol decomposition, the TERO accelerated ethylene production only and enhanced the selectivity for ethylene production from 40% to 96%. Randomly distributed standing waves due to large lattice displacement vertical to the surface were generated with TERO on. The photoelectron emission spectra showed that the TERO caused a positive shift of the threshold energy of photoelectron emission from a Pd surface, indicating an increase in the work function of the surface. The TERO, effects on a Pd catalyst were compared with those previously observed for a Ag catalyst.