Photocrosslinkable systems with thermally cleavable properties based on blends of poly(vinyl phenol) (PVP) and diepoxides were investigated. Thermally cleavable diepoxides as crosslinkers were prepared and characterized. As a thermally cleavable linkage, a tertiary ester moiety was incorporated into the crosslinker molecule. PVP/crosslinker blended films containing photoacid generators (PAGs) became insoluble in solvents after UV irradiation and subsequent post-exposure-bake (PEB) treatment. With a rise in the PEB temperature, the insoluble fraction of the irradiated films increased, passed through a maximum value, decreased, and increased again at elevated baking temperatures. The insolubilization. profiles of the irradiated films were complicated and strongly dependent on the type of PAG used, the structure of the crosslinkers, and the PVP/crosslinker ratio. A mechanism for the thermal degradation was studied with Fourier transform infrared spectroscopy.