Thin film, Sn, Cu-Sn and Sn-Zr-(O) anodes for microbatteries are deposited on a copper substrate by radio frequency (rf)-magnetron sputtering at room temperature. Charge-discharge characteristics are compared. It appears that the alloying of Sn with Cu or Zr improves the cycling performance. The best cycling efficiency is obtained when Sn is alloyed with Zr. The effects of alloying elements on the electrochemical properties on the thin film are discussed.