Direct implantation of Fe, Ni or Mn at doses of 3-5 x 10(16)cm(-2) into p-type 6H-SiC substrates was carried out at a sample temperature of similar to350 degreesC. Subsequent annealing was performed at 7001000 degreesC for 5 mins. Residual damage in the form of end-of-range defects and dislocation loops in the region from the surface to a depth of similar to0.20 mum were examined by transmission electron microscopy. To the sensitivity of both x-ray diffraction and selected area diffraction pattern analysis, no secondary phases could be detected. Signatures of ferromagnetism were observed in all the highest dose samples, with apparent Curie temperatures of 50 K (Ni). 250 K (Mn). and 270 K (Fe).