Low frictional coatings made of copper, boron nitride, and oxygen on a stainless steel substrate were synthesized by magnetron cosputter deposition combined with excimer laser irradiation. The frictional force of the coating films was observed by a system developed for measuring vacuum friction. The coating properties were also observed by a conventional contact angle measuring system, a scanning Auger electron spectrometer, and a Vickers hardness measuring system. The surface layer of the coating films was oxidized by the excimer laser irradiation. Surface energy and film hardness were also modified by the laser irradiation. Frictional coefficients as low as 0.075 were achieved after irradiating the films under ultrahigh vacuum conditions. Since these coating films have already been oxidized and irradiated with high energy UV light they will be applicable for aerospace coatings.