Journal of Vacuum Science & Technology B, Vol.20, No.4, 1465-1470, 2002
Process and realization of a three-dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system
The process and realization of a light and low resistive antenna for wireless communications by inductive coupling at 13.56 MHz is presented. The antenna is realized on an insulated substrate made of SU-8 resist in order to prevent the losses due to eddy cur-rents from occurring and to strongly decrease its weight. The conductor is obtained by electroplating 24 mum of gold in a mold of AZ-4562 resist. A Q factor of 29 has been obtained with a maximum of 37 at 19 MHz, for antenna dimensions of 1.5 x 1.5 cm(2). This antenna is the key component for a wireless power supplied microrobot.