Zinc oxide (ZnO)/silica (SiO2) composite nanoparticles were made by flame spray pyrolysis. The effects of the Zn/Si ratio on particle properties were examined and compared with those of the pure ZnO and SiO2 particles made at the same conditions. Polyhedral aggregates of nano-sized primary particles were obtained in all experiments. The mixed-oxide primary particle size was smaller than that of pure oxides. The primary particles consisted of ZnO nano-crystals and amorphous SiO2, as seen by high-resolution transmission electron microscopy (HR-TEM) and X-ray diffraction (XRD) analysis using the fundamental parameter approach. The XRD size of ZnO was controlled from 1.2 to 11.3 nm by the initial precursor composition and it was consistent with HR-TEM. The composite particles exhibited an excellent thermal stability and little crystalline growth of ZnO (e. g., from 1.9 to 2.2 nm) was observed even after calcination at 600degreesC.