Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.20, No.6, 2134-2136, 2002 DOI10.1116/1.1513641 Export Citation Low temperature deposition of alpha-Al2O3 thin films by sputtering using a Cr2O3 template Jin P, Xu G, Tazawa M, Yoshimura K, Music D, Alami J, Helmersson U Please enable JavaScript to view the comments powered by Disqus.
