I-V characteristics of vacuum deposited polyvinyl fluoride (PVF) films have been investigated as a function of temperature in the range of 303 K to 403 K and as a function of thickness in the range of 2500 Angstrom to 10000 Angstrom, respectively. The I-V curves of these films show two distinct regions of conduction, viz., ohmic region at low-fields with slope similar to1 and non-ohmic region at high-fields with slope similar to2. Space charge limited conduction (SCLC) has been suggested as the dominant mechanism of conduction at high-fields. (C) 2003 Kluwer Academic Publishers.