Phosphonate-functionalized polysiloxanes have been prepared with a new siloxane/phosphonate monomer. The reaction of 3-chloropropylmethyldimethoxysilane with trimethylphosphite or triethylphosphite produces several new monomers containing pendant phosphonate groups. Copolymerization with dimethyldimethoxysilane has produced polymers soluble in most organic solvents. The acid hydrolysis of the phosphoryl esters has produced hydrophilic siloxane polymers containing phosphonic acid groups. The thermal properties of the polymers and several related small molecules have been compared with thermogravimetric analysis. Both the monomers and the resulting polymers have been characterized with H-1, C-13, P-31, and Si-29 NMR.