화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.20, No.6, 2526-2534, 2002
Correction of chromatic and spherical aberration in electron microscopy utilizing the time structure of pulsed excitation sources
A theoretical ansatz for correction of the chromatic and spherical aberration of round-lens systems in photoemission and low-energy electron microscopy (PEEM/LEEM) is presented. The method is based on fast switching of electrical acceleration or lens fields. It exploits the highly precise time structure of pulsed photon sources like electron storage rings for synchrotron radiation or pulsed lasers as well as pulsed photocathodes of a LEEM. The initial results indicate that the approach is a promising alternative to the implementation of multipole or mirror correctors in the electron optical column of a microscope.