Journal of Vacuum Science & Technology B, Vol.20, No.6, 2745-2748, 2002
Localized and directed lateral growth of carbon nanotubes from a porous template
We report on the growth of laterally oriented carbon nanotubes with both positional and directional control. The growth was done by chemical vapor deposition from Fe/Mo catalyst embedded inside a porous silicon medium which was formed electrochemically on the vertical faces of etched posts on a silicon substrate. A solution containing the catalyst was allowed to diffuse into the porous medium only in lithographically defined areas. Nanotubes grew only in the patterned areas with a preferred orientation normal to the edges of the etched posts.