A comparative analysis of fracture for various films is presented. Films of Cr-B, Ti-Si-N, Ti-B-N and Ti-Cr-B-N were deposited by DC magnetron sputtering of composite targets. The indentation of the as-deposited films on (0 0 1) Si substrates was made using Vickers microhardness tester at a load of 10, 25 and 50 g. The scanning electron microscopy and atomic force microscopy studies were fulfilled to investigate the film behavior during localized deformation. Both homogeneous and localized inhomogeneous deformations of the fracture surface were observed and described. Isolated particles located within the area of deformation were frequently observed. The films were characterized in terms of their structure, hardness, elastic modulus, elastic recovery and surface topography. The H-3/E-2 2 ratio (i.e. resistance to plastic deformation) was proposed to be a ranking parameter for the prediction of shear banding under the localized deformation. The correlation between the surface roughness, surface relief inside indentations and columnar fracture morphology was outlined. It was suggested that column sliding is the dominant fracture mechanism resulting in the formation of breaking-away particles under unloading.