The effect of europium substitution on the ferroelectric properties of Bi4Ti3O12 thin films has been investigated. Ferroelectric europium-substituted Bi4Ti3O12 thin films were fabricated by spin-coating onto a Pt/Ti/SiO2/Si substrate. The structure and morphology of the films were analyzed using X-ray diffraction and scanning electron microscopy, respectively. After annealing at 750 degreesC, Bi3.25Eu0.75Ti3O12 (BET) films become crystallized and exhibit a polycrystalline structure. The BET thin films showed a large remanent polarization (2P(r)) of 60.99 muC/cm(2) at an applied voltage of 10 V. The BET thin films exhibited no significant degradation of switching charge for at least up to 5 X 10(9) switching cycles at a frequency of 50 kHz.