Epitaxial films of CuInSe2 on Si(1 1 1) were modified by the application of an electric field through a movable tip. The electric field induces stable junction regions which are identified by separation and collection of electron beam-induced charge carriers. The movable tip allows scribing of these junction regions and one-sided connection to a contact pad. The junction formation is mainly due to electric field application and, in contrast to what was found to be the case for bulk samples, is not accompanied by a significant temperature rise. The junctions can be explained by symmetrical p/p(+)/n/p(+)/p regions formed within the CuInSe2 epilayers. The reported method presents a new way for junction patterning in two dimensions. (C) 2003 Elsevier Science B.V. All rights reserved.