화학공학소재연구정보센터
Thin Solid Films, Vol.426, No.1-2, 62-67, 2003
Growth of highly (001)-textured strontium barium niobate thin films on epitaxial LaNiO3/CeO2/YSZ/Si(100)
(Sr,Ba)Nb2O6 (SBN) thin films were deposited on epitaxial LaNiO3/CeO2/YSZ/Si(100) substrates by a pulsed laser deposition method. Epitaxial-like highly (001)-textured SBN thin films were obtained on LaNiO3/CeO2/YSZ/Si(100). Phi scans on the (311) plane revealed that the films have two in-plane orientations. The unit cell of SBN is rotated in the plane of the film by 18.6degrees with respect to the unit cell of the Si substrate. These results were compared with those of SBN thin films deposited on Pt/Ti/SiO2/Si substrates.