The L1(0) ordering in co-sputtered CuAu films was investigated at first. It is found that the Cu50Au50 (at.%) film starts L1(0) ordering above the 100 degreesC substrate temperature, and can be fully L1(0) ordered (long-range order parameter S approximate to 1) at the 450 degreesC substrate temperature. Besides, the thickness has effect on the crystal structure of CuAu films. Thereafter, the prepared L1(0) ordered CuAu film was used as the buffer layer for the FePt film. Both XRD patterns and magnetic measurements reveal that the L1(0)-ordered CuAu buffer layer effectively enhances the L1(0) ordering in FePt thin films. Approximately 10-kOe coercivity can be obtained for the FePt thin film with the CuAu buffer layer prepared at the 450 degreesC substrate temperature. (C) 2003 Elsevier Science B.V. All rights reserved.