We deposited cadmium sulfide (CdS) thin films using the chemical-bath deposition (CBD) and close-spaced sublimation (CSS) techniques. The films were then treated in CdCl2 vapor at 400 degreesC for 5 min. The CSS US films had hexagonal structure, and good crystallinity. The CdCl2 treatment did not produce major changes, but there was a decrease in the density of planar defects. The untreated CBD US films had cubic structure and poorer crystallinity than the CSS films. After the CdCl2 treatment, these films recrystallized to the hexagonal phase, resulting in better crystallinity and a lower density of planar defects. The conformal coverage and the presence of bulk oxygen are the key issues in making the CBD films more suitable for photovoltaic applications. (C) 2003 Elsevier Science B.V. All rights reserved.