옥타데실트리클로로실란 코팅에 의한 실리콘 표면 특성 변화

유희재; 김수경; 김지홍; 강호종; Hee Jae Yoo; Soo Kyung Kim; Jin Hong Kim; Ho Jong Kang

Polymer(Korea), Vol.27, No.6, 555-561, November, 2003

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옥타데실트리클로로실란 코팅에 의한 실리콘 표면 특성 변화

Surface Characteristics of Silicon Substrates Coated with Octadecyltrichlorosilane

유희재, 김수경¹, 김지홍², 강호종 ^†

단국대학교 기능성 고분자 신소재 연구센터, 고분자공학과, 서울 140-714
¹LG 전자기술원, 서울 137-724
²LG Elite, 서울 137-724

Hee Jae Yoo, Soo Kyung Kim¹, Jin Hong Kim², and Ho Jong Kang^†

Center for Advanced Functional PolymersDept. of Polymer Science and Engineering, Dankook University, #8 Hannam-dong, Yongsan-gu, Seoul 140-714, Korea
¹Digital media Lab. LG Electronics Inc., 16 Woomyeon-dong, Seocho-gu, Seoul 137-724, Korea
²Devices & Materials, LG Elite, Woomyeon-dong, Seocho-gu, Seoul 137-724, Korea

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초록

미세전자기계 시스템에 사용되는 실리콘 기판의 표면 특성 조절을 위하여 옥타데실트리클로로실란(OTS)을 실리콘에 자기조립 단분자층(SAMs)으로 형성시켜, 코팅 조건 및 코팅 용액 조성에 따른 표면 특성 변화를 살펴보았다. OTS와의 솔-젤 반응을 위하여 실리콘 표면을 sulfuric peroxide mixture (SPM) 용액으로 처리한 결과, 실리콘 표면에 -OH기가 형성되어 친수성이 증가됨을 알 수 있었으며 상온에서 황산의 비가 85%인 SPM 용액에서 솔-젤 반응을 위한 최적의 산화막이 형성됨을 알 수 있었다. SPM 처리에 의하여 발현된 실리콘 표면의 -OH기는 솔-젤 반응에 의하여 OTS의 -Cl기와 반응하여 Si-O 화학결합을 형성하며 이에 따라 표면은 소수성으로 변화됨을 확인할 수 있었다. 이 때 코팅 온도 및 시간 그리고 용액의 조성은 솔-젤 반응에 영향을 미쳐 SAMs 표면의 소수성을 조절하는 인자로 작용하였다.

The self-assembled monolayer coating of octadecyltrichlorosilane (OTS) on the silicon based MEMS was investigated and surface characteristics were considered as a function of coating conditions and reagent composition. The sulfuric peroxide mixture (SPM) solution was used to form -OH group which caused the hydrophilic characteristic on silicon surface. Highest hydrophilicity was obtained by SPM solution with 85% acid content at room temperature. OTS was applied on the silicon surface by means of self-assembled monolayers (SAMs) coating. It was found that sol-gel reaction was took place between -OH group on the silicon surface and -Cl group in OTS. As a result, the contact angle increased due to the increase of hydrophobicity by Si-O bonding of SAMs. Sol-gel reaction could be controlled by coating conditions as well as reagent composition in OTS coating solution.

Keywords:octadecyltrichlorosilane;MEMS;silicon substrates;contact angle;hydrophilicity;hydrophobicity

[References]

Bhushan B, Handbook of Micro/Nano Technology, CRS Press, Boca Raton, Florida, U.S.A. (1995)
Komvopoulos K, Wear, 200, 305 (1996)
Rymuza Z, Microsystem Technol., 5, 173 (1999)
Hair ML, Tripp CP, Colloids Surf. A: Physicochem. Eng. Asp., 105, 95 (1995)
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Cha KH, Kim DE, Wear, 251, 1169 (2001)
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Choi J, Gawaguchi M, Kato T, J. Appl. Phys., 91, 7574 (2002)
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[Related Articles]

[1] Bhushan B, Handbook of Micro/Nano Technology, CRS Press, Boca Raton, Florida, U.S.A. (1995)

[2] Komvopoulos K, Wear, 200, 305 (1996)

[3] Rymuza Z, Microsystem Technol., 5, 173 (1999)

[4] Hair ML, Tripp CP, Colloids Surf. A: Physicochem. Eng. Asp., 105, 95 (1995)

[5] Deng K, Collins RJ, Mehregany M, Sukenik CN, J. Electrochem. Soc., 142(4), 1278 (1995)

[6] Clechet P, Martelet C, Belin M, Zarrad H, Sens. Actuators A-Phys., 44, 77 (1994)

[7] Cha KH, Kim DE, Wear, 251, 1169 (2001)

[8] Liu HW, Ahmed SIU, Scherge M, Thin Solid Films, 381(1), 135 (2001)

[9] Schmidt H, J. Non-Cryst. Solids, 178, 302 (1994)

[10] Choi J, Gawaguchi M, Kato T, J. Appl. Phys., 91, 7574 (2002)

[11] Sagiv J, J. Am. Chem. Soc., 102, 92 (1980)