Confocal scanning laser microscopy (CSLM) was applied to the surface morphological study of the anodic oxide film-covered Al5052 alloy. "Contrast" and "height" images of the specimens were obtained by scanning the laser beam in the x, y, and z directions. The incident laser beam appeared to be reflected by either the outer oxide surface, imperfections in the oxide film, or the inner oxide/metal interface. Contrast images of the outer oxide surface and the metal/oxide interface were obtained separately by choosing different scanning ranges of the focused z point of the incident laser beam. Two different types of imperfections, bright and dark, were observed in the contrast images of CSLM. The bright imperfections may correspond to inclusions with high reflectivity, and the dark ones to inclusions with uneven surfaces. The z position of the bright imperfections in the oxide film was determined by analyzing the height images. (C) 2003 The Electrochemical Society.